JPH03125066U - - Google Patents
Info
- Publication number
- JPH03125066U JPH03125066U JP3122290U JP3122290U JPH03125066U JP H03125066 U JPH03125066 U JP H03125066U JP 3122290 U JP3122290 U JP 3122290U JP 3122290 U JP3122290 U JP 3122290U JP H03125066 U JPH03125066 U JP H03125066U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- inert gas
- rate sensor
- flow rate
- flow path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010926 purge Methods 0.000 claims description 8
- 239000011261 inert gas Substances 0.000 claims description 3
- 230000000903 blocking effect Effects 0.000 claims 1
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 239000007789 gas Substances 0.000 description 2
- 239000000376 reactant Substances 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3122290U JPH03125066U (en]) | 1990-03-27 | 1990-03-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3122290U JPH03125066U (en]) | 1990-03-27 | 1990-03-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03125066U true JPH03125066U (en]) | 1991-12-18 |
Family
ID=31533964
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3122290U Pending JPH03125066U (en]) | 1990-03-27 | 1990-03-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03125066U (en]) |
-
1990
- 1990-03-27 JP JP3122290U patent/JPH03125066U/ja active Pending
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